The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 23, 2019

Filed:

Aug. 12, 2015
Applicant:

University of South Carolina, Columbia, SC (US);

Inventors:

Goutam Koley, Anderson, SC (US);

Abdul Talukdar, Hillsboro, OR (US);

Assignee:

University of South Carolina, Columbia, SC (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B01L 3/00 (2006.01); B81C 1/00 (2006.01); G01N 21/17 (2006.01); G01N 29/02 (2006.01); G01N 29/24 (2006.01); H01L 29/20 (2006.01); H01L 29/778 (2006.01); H01L 29/66 (2006.01); G01N 29/22 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
B81C 1/0015 (2013.01); B01L 3/5027 (2013.01); B01L 3/502707 (2013.01); G01N 21/1702 (2013.01); G01N 29/022 (2013.01); G01N 29/222 (2013.01); G01N 29/2425 (2013.01); H01L 21/0254 (2013.01); H01L 21/02381 (2013.01); H01L 21/02439 (2013.01); H01L 29/66431 (2013.01); H01L 29/66462 (2013.01); H01L 29/778 (2013.01); B01L 2300/0663 (2013.01); B01L 2300/0877 (2013.01); B01L 2400/0484 (2013.01); B81B 2203/0118 (2013.01); G01N 2291/014 (2013.01); H01L 29/2003 (2013.01); H01L 29/7786 (2013.01);
Abstract

A microcantilever based photoacoustic sensor is generally provided. In one embodiment, the microcantilever includes: a substrate; a GaN layer on the substrate, wherein the GaN layer defines a cantilever extending beyond an edge of the substrate, with a base area of the cantilever defined by the area spanning the edge of the substrate; a heterojunction field effect transistor (HFET) deflection transducer positioned on the cantilever; a pair of electrical contacts, each electrically connected to the HFET deflection transducer; and a microfluidic channel in fluid communication with an analyte reservoir, wherein the analyte reservoir is positioned at the base of the cantilever. A sensing system is also generally provided.


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