The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 23, 2019

Filed:

Jul. 27, 2012
Applicants:

Takahide Suda, Sizuoka, JP;

Takao Nishio, Sizuoka, JP;

Kenta Yamamoto, Yokohama, JP;

Yuto Moritani, Yokohama, JP;

Tatsuo Tomizawa, Tokyo, JP;

Torao Iida, Tokyo, JP;

Takashi Nihongi, Tokyo, JP;

Inventors:

Takahide Suda, Sizuoka, JP;

Takao Nishio, Sizuoka, JP;

Kenta Yamamoto, Yokohama, JP;

Yuto Moritani, Yokohama, JP;

Tatsuo Tomizawa, Tokyo, JP;

Torao Iida, Tokyo, JP;

Takashi Nihongi, Tokyo, JP;

Assignees:

CHEMOURS-MITSUI FLUOROPRODUCTS CO., LTD., Minato-Ku, Tokyo, JP;

NICHIAS CORPORATION, Chuo-Ku, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 1/02 (2006.01); B32B 1/00 (2006.01); B29C 45/00 (2006.01); C08F 14/26 (2006.01); C08L 27/18 (2006.01); H01L 21/67 (2006.01); B29K 27/12 (2006.01); B29L 31/00 (2006.01);
U.S. Cl.
CPC ...
B32B 1/02 (2013.01); B29C 45/00 (2013.01); B29C 45/0001 (2013.01); B32B 1/00 (2013.01); C08F 14/26 (2013.01); C08L 27/18 (2013.01); B29K 2027/12 (2013.01); B29K 2995/0058 (2013.01); B29L 2031/7126 (2013.01); C08L 2205/025 (2013.01); C08L 2205/14 (2013.01); H01L 21/6719 (2013.01); Y10T 428/139 (2015.01); Y10T 428/1352 (2015.01); Y10T 428/1372 (2015.01); Y10T 428/1379 (2015.01); Y10T 428/1397 (2015.01);
Abstract

Provided is a large-size injection molded article which is obtained by injection molding a composition containing a heat-meltable fluoropolymer. Specifically, provided is a large-size injection molded article, which can be molded at a lower injection pressure as compared with a conventional PFA and obtained by molding a composition superior in mold release characteristics from a metal mold. This large-size injection molded article is superior in, particularly, heat resistance and chemical resistance, as well as dimensional accuracy, for a substrate processing apparatus. Provided is an injection molded article, having a projection area in an injection direction of 1100 cmor more, obtained by injection molding a composition containing a heat-meltable fluoropolymer. It is a preferable aspect that the composition including a heat-meltable fluoropolymer is a composition containing a melt moldable tetrafluoroethylene/fluoroalkoxytrifluoroethylene copolymer having an MFR over 60 g/10 minutes.


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