The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 16, 2019

Filed:

Mar. 16, 2018
Applicant:

Sakai Display Products Corporation, Osaka, JP;

Inventors:

Yoshiaki Matsushima, Osaka, JP;

Shigeru Ishida, Osaka, JP;

Ryouhei Takakura, Osaka, JP;

Satoru Utsugi, Osaka, JP;

Nobutake Nodera, Osaka, JP;

Takao Matsumoto, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/786 (2006.01); H01L 21/02 (2006.01); H01L 29/66 (2006.01); G02F 1/1368 (2006.01); H01L 27/12 (2006.01);
U.S. Cl.
CPC ...
H01L 29/78696 (2013.01); H01L 21/02532 (2013.01); H01L 21/02592 (2013.01); H01L 21/02678 (2013.01); H01L 29/66765 (2013.01); H01L 29/786 (2013.01); H01L 29/78609 (2013.01); H01L 29/78669 (2013.01); H01L 29/78678 (2013.01); G02F 1/1368 (2013.01); G02F 2202/103 (2013.01); G02F 2202/104 (2013.01); H01L 27/1229 (2013.01); H01L 27/1285 (2013.01);
Abstract

Provided are a thin film transistor having properties properly adjusted by adjusting crystallinity of a polycrystalline silicon, and a method of manufacturing the same. The silicon layer functioning as a channel layer of a TFT comprises an amorphous part, a first polycrystalline part and a second polycrystalline part. The first and second polycrystalline parts are formed by irradiating the silicon layer with laser beams (energy beams) through the mask comprising the shielding part for shielding the energy beams, the first transmission part for transmitting the energy beams and the second transmission part for transmitting the energy beams at a transmittance lower than that of the first transmission part. By the presence of the second polycrystalline part, properties of the TFT such as an electron mobility are properly adjusted. Further, properties of the TFT can be adjusted easily by adjusting the configuration of the mask.


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