The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2019
Filed:
Feb. 09, 2016
Screen Holdings Co., Ltd., Kyoto, JP;
Hiroaki Takahashi, Kyoto, JP;
Yuto Kubo, Kyoto, JP;
SCREEN Holdings Co., Ltd., , JP;
Abstract
A substrate holding unit which holds the substrate, a nozzle which includes a first cylindrical member within which a first flow path along which the first fluid is passed is formed and in which a tip end edge of the first cylindrical member defines, between the tip end edge and a main surface of the substrate, an annular first discharge port that discharges the fluid flowing through the first flow path along the main surface of the substrate radially and a first fluid supply unit which is a fluid supply unit supplying the first fluid to the first flow path of the nozzle and which applies, to the nozzle, a force in a direction apart from the main surface of the substrate, by the discharge of the first fluid from the first discharge port.