The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2019
Filed:
May. 22, 2015
Applicant:
Nikon Corporation, Tokyo, JP;
Inventors:
Assignee:
NIKON CORPORATION, , JP;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/58 (2006.01); G03F 7/20 (2006.01); H02K 41/02 (2006.01); H02K 15/00 (2006.01); H02K 41/03 (2006.01); H02K 1/27 (2006.01);
U.S. Cl.
CPC ...
G03F 7/20 (2013.01); G03F 7/70758 (2013.01); H02K 15/00 (2013.01); H02K 41/02 (2013.01); H02K 41/031 (2013.01); H02K 1/27 (2013.01); H02K 2201/18 (2013.01); Y10T 29/49011 (2015.01);
Abstract
A stage mover for moving a stage relative to a stage base includes a conductor assembly and a magnet assembly. The conductor assembly is coupled to the stage base and a plurality of coil units with each coil unit having one or more coils. Each of the coils has a coil width. The magnet assembly interacts with the conductor assembly and includes a plurality of spaced apart magnet arrays. Each of the magnet arrays is spaced apart from each adjacent magnet array by an array gap that is at least equal to the coil width so that independent and symmetric magnetic flux distribution can be achieved for each of the magnet arrays.