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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10261413 B1

PDFFull Text
Date of Patent:
Apr. 16, 2019

Filed:

Jun. 14, 2017

Photocurable composition for imprints, pattern forming method, and method for manufacturing device

Applicant:

Fujifilm Corporation, Tokyo, JP;

Inventors:

Hirotaka Kitagawa, Haibara-gun, JP;

Yuichiro Goto, Haibara-gun, JP;

Assignee:

FUJIFILM Corporation, Tokyo, JP;

Attorney:

Sughrue Mion, PLLC

Primary Examiner:

Tae H Yoon

Int. Cl.
CPC ...
G03F 7/00 (2006.01); C08F 2/48 (2006.01); C08F 214/18 (2006.01); H01L 21/027 (2006.01); B41M 5/00 (2006.01); C09D 7/40 (2018.01); C08F 2/44 (2006.01); C08F 2/50 (2006.01); C08F 220/22 (2006.01); C09D 11/30 (2014.01); B41M 7/00 (2006.01); C08F 222/10 (2006.01); C08F 220/18 (2006.01); C09D 11/101 (2014.01); C09D 11/102 (2014.01); G03F 7/004 (2006.01); G03F 7/027 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B41M 5/0047 (2013.01); B41M 7/0081 (2013.01); C08F 2/44 (2013.01); C08F 2/48 (2013.01); C08F 2/50 (2013.01); C08F 220/18 (2013.01); C08F 220/22 (2013.01); C08F 222/1006 (2013.01); C09D 7/40 (2018.01); C09D 11/101 (2013.01); C09D 11/102 (2013.01); C09D 11/30 (2013.01); G03F 7/0046 (2013.01); G03F 7/027 (2013.01); H01L 21/0271 (2013.01); C08F 2222/102 (2013.01);
Abstract

Provided are a photocurable composition for imprints, having good releasability and temporal stability of the releasability, a pattern forming method, and a method for manufacturing a device. This photocurable composition for imprints includes a monofunctional chained aliphatic (meth)acrylate (A1) not containing a fluorine atom, a bifunctional or higher polyfunctional (meth)acrylate (A2) not containing a fluorine atom, a monofunctional (meth)acrylate (B) containing a fluorine atom, a photopolymerization initiator (C), and a non-polymerizable compound (D) having a polyoxyalkylene structure in a proportion of 1% to 5% by mass, in which the monofunctional chained aliphatic (meth)acrylate (A1) not containing a fluorine atom has a boiling point of 100° C. to 200° C. at a pressure of 0.67 kPa, and the monofunctional (meth)acrylate (B) containing a fluorine atom has a boiling point of 100° C. to 200° C. at a pressure of 0.67 kPa.

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