The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 16, 2019

Filed:

Feb. 26, 2018
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Suguru Uchiyama, Suwa, JP;

Kosuke Takahashi, Matsumoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); H01L 23/04 (2006.01); H01L 23/31 (2006.01); H01L 23/467 (2006.01); H01L 23/498 (2006.01); H01L 23/00 (2006.01); B81B 7/00 (2006.01); G02B 7/18 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0833 (2013.01); B81B 7/0067 (2013.01); H01L 23/04 (2013.01); H01L 23/3121 (2013.01); H01L 23/3135 (2013.01); H01L 23/467 (2013.01); H01L 23/49822 (2013.01); H01L 23/49827 (2013.01); H01L 23/49838 (2013.01); H01L 24/49 (2013.01); G02B 7/181 (2013.01); H01L 24/48 (2013.01); H01L 2224/48091 (2013.01); H01L 2224/48106 (2013.01); H01L 2224/48227 (2013.01); H01L 2224/73265 (2013.01);
Abstract

An electro-optic device includes a chip provided with a mirror and a drive element adapted to drive the mirror, a light-transmitting cover adapted to cover the mirror in a planar view, and a spacer having contact with one surface of the chip between the cover and the chip. The entire part of one surface of the chip having contact with the spacer is made of a first material such as silicon oxide film having first thermal conductivity, and the spacer is made of a second material such as a quartz crystal having second thermal conductivity higher than the first thermal conductivity. The cover is made of a third material such as sapphire having third thermal conductivity higher than the second thermal conductivity.


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