The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 16, 2019

Filed:

Jul. 18, 2017
Applicant:

Xerox Corporation, Norwalk, CT (US);

Inventors:

Francisco Zirilli, Penfield, NY (US);

Michael B. Monahan, Webster, NY (US);

Jeffrey J. Bradway, Rochester, NY (US);

Assignee:

Xerox Corporation, Norwalk, CT (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G02B 7/18 (2006.01); G03B 21/00 (2006.01);
U.S. Cl.
CPC ...
G02B 7/1815 (2013.01); G02B 26/0833 (2013.01); G03B 21/008 (2013.01);
Abstract

A DMD chip includes a micromirror array mounted on a very thin silicon wafer attached to a cooling system integrated within the DMD chip. The cooling system includes a fluid cooled heat sink with a cooling channel. Fluid coolant may be pumped through the channel and out of the DMD to remove heat from the silicon substrate and the micromirror array. The micromirror array may be hermetically sealed within the housing, with the heat sink located between the micromirror array and a back wall of the housing, with both the heat sink and the array within the interior of the housing.


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