The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2019
Filed:
Nov. 08, 2016
Acemach Co., Ltd, New Taipei, TW;
Chih-Chiang Chang, New Taipei, TW;
Acemach Co., Ltd., New Taipei, TW;
Abstract
Provided herein is a mask inspection device, including an inspection base, a shift platform, a rotating platform, a bearing platform, a laser ranging module, a vertical shift module, a processing module, and an image capturing module. A mask, which is carried and held by the bearing platform, includes a dust-proof film, each region of which is measured by the laser ranging module for generating a distance measuring signal; each distance measuring signal is utilized to control the movement of the vertical shift module, such that image capturing module can take an inspection image of that region. Based on the distance measuring signals and inspection images, height information of the dust-proof film and inspection information can be acquired. Also provided herein is a method applicable to said mask inspection device.