The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2019
Filed:
Apr. 29, 2015
Applicant:
Attocube Systems Ag, München, DE;
Inventors:
Martin Zech, Finsing, DE;
Klaus Thurner, München, DE;
Assignee:
attocube systems AG, Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/02 (2006.01); G01B 11/14 (2006.01); G01B 9/02 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G01B 11/14 (2013.01); G01B 9/0205 (2013.01); G01B 9/02015 (2013.01); G03F 7/70775 (2013.01);
Abstract
Interferometer () for the real-time measurement of absolute distances and/or relative position movements between a first and a second machine part, comprising a measurement unit () and a reflector unit ().