The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2019
Filed:
Mar. 17, 2016
Applicant:
Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;
Inventor:
Loic Joet, Grenoble, FR;
Assignee:
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/08 (2006.01); H04R 19/04 (2006.01); H04R 17/02 (2006.01); H04R 7/04 (2006.01); H04R 7/24 (2006.01); H04R 19/00 (2006.01);
U.S. Cl.
CPC ...
H04R 19/04 (2013.01); G01L 9/08 (2013.01); H04R 7/04 (2013.01); H04R 7/24 (2013.01); H04R 17/02 (2013.01); H04R 19/005 (2013.01); H04R 2201/003 (2013.01);
Abstract
Dynamic pressure sensor of MEMS and/or NEMS type comprising a support and a rigid sensitive element anchored to the support by at least one anchoring zone, said sensitive element comprising a parallel first and a second face intended to be subjected to different pressures, said sensitive element being capable of having an out-of-plane displacement with respect to the support in a detection direction under the effect of a pressure difference, the pressure sensor also comprising a detector of a force applied to the sensitive element by the pressure difference.