The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2019
Filed:
Mar. 31, 2017
Avago Technologies General Ip (Singapore) Pte. Ltd., Singapore, SG;
Siamak Fouladi Azarnaminy, San Jose, CA (US);
David A. Feld, Newark, CA (US);
Qiang Zou, Fort Collins, CO (US);
Andrew Barfknecht, Menlo Park, CA (US);
Mohamed Abd Allah, Sunnyvale, CA (US);
Jing Wu, San Jose, CA (US);
Zongliang Cao, San Jose, CA (US);
Guiti Zolfagharkhani, San Jose, CA (US);
Avago Technologies International Sales Pte. Limited, Singapore, SG;
Abstract
A BAW resonator includes a nonlinear substrate defining a cavity, and an acoustic stack over the cavity, including a bottom electrode, a piezoelectric layer, and a top electrode, where an active region of the acoustic stack includes overlapping portions of the cavity, the bottom electrode, the piezoelectric layer and the top electrode. The BAW resonator further includes a connecting strip extending from a portion of the top electrode for providing electrical excitation of the acoustic stack, where an E-field generated in the BAW resonator begins at the top electrode and terminates at the bottom electrode in response to the electrical excitation. The cavity includes an inner portion in the active region and an extended portion extending from an outer perimeter of the active region underneath the connecting strip. A length of the extended portion are sufficient to substantially prevent portions of the E-field from passing through the substrate.