The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2019
Filed:
Nov. 25, 2015
Applicant:
Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v., Munich, DE;
Inventors:
Nicolas Lange, Jena, DE;
Frank Wippermann, Meiningen, DE;
Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H02N 11/00 (2006.01); H02N 1/00 (2006.01); H02N 2/00 (2006.01); H01L 41/04 (2006.01); B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
H02N 1/006 (2013.01); B81B 3/0086 (2013.01); B81B 2201/038 (2013.01); B81B 2203/019 (2013.01); B81B 2203/04 (2013.01); B81B 2203/058 (2013.01);
Abstract
An electrostatic actuator having a stationary electrode and a fixedly cantilevered bender is described, wherein the bender includes a cantilever electrode disposed opposite to the stationary electrode in an overlapping area and being deflectable in the direction of the stationary electrode.