The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 09, 2019

Filed:

Dec. 04, 2017
Applicant:

Vanguard International Semiconductor Corporation, Hsinchu, TW;

Inventors:

Manoj Kumar, Jharkhand, IN;

Ankit Kumar, Jharkhand, IN;

Chia-Hao Lee, New Taipei, TW;

Chih-Cherng Liao, Jhudong Township, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/423 (2006.01); H01L 29/49 (2006.01); H01L 29/66 (2006.01); H01L 21/28 (2006.01); H01L 21/02 (2006.01); H01L 21/306 (2006.01); H01L 21/265 (2006.01); H01L 21/266 (2006.01); H01L 29/788 (2006.01);
U.S. Cl.
CPC ...
H01L 29/42336 (2013.01); H01L 21/0223 (2013.01); H01L 21/02164 (2013.01); H01L 21/266 (2013.01); H01L 21/26513 (2013.01); H01L 21/28273 (2013.01); H01L 21/30604 (2013.01); H01L 29/4916 (2013.01); H01L 29/66825 (2013.01); H01L 29/7881 (2013.01); H01L 21/02255 (2013.01);
Abstract

A split-gate flash memory cell is provided. The split-gate flash memory cell includes a semiconductor substrate having a source region and a drain region. The source region and the drain region are separated by a channel region. The split-gate flash memory cell also includes a concave trench in the semiconductor substrate, a floating gate dielectric lining the concave trench, and a floating gate situated in the concave trench on the floating gate dielectric. The floating gate has a convex bottom surface. The split-gate flash memory cell also includes an inter-gate dielectric on the floating gate, and a control gate on the inter-gate dielectric.


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