The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 09, 2019

Filed:

Nov. 30, 2016
Applicant:

Berliner Glas Kgaa Herbert Kubatz Gmbh & Co., Berlin, DE;

Inventors:

Peter Preuss, Neu-Zittau, DE;

Gunnar Heinze, Luebbenau, DE;

Michael Fall, Berlin, DE;

Alexander Stein, Berlin, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6831 (2013.01); H01L 21/6833 (2013.01);
Abstract

An electrostatic holding device () for holding component () by electrostatic holding forces includes clamp carrier () which has electrode device () and is configured for receiving component (), voltage source device () for provision of a source charge current for charging clamp carrier (), source switching device () which is arranged for a switchable connection of voltage source device () with electrode device (), and at least one charge storage device (A,B) which has storage capacitor (A,B) and is configured to receive a clamp discharge current and temporarily store electrical charges of clamp carrier () in storage capacitor (A,B) and provide a storage charge current for charging clamp carrier (). Also described is a method for operating holding device () and transfer circuit () for transmitting charges from working capacitor () to storage capacitor ().


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