The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2019
Filed:
Feb. 01, 2016
Canon Kabushiki Kaisha, Tokyo, JP;
Yutaka Mita, Utsunomiya, JP;
Tsuyoshi Arai, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
The present invention provides an imprint apparatus which forms a pattern on an imprint material on a shot region on a substrate by using a mold, the apparatus comprising a supply unit having a plurality of discharge outlets each of which is configured to discharge the imprint material, and configured to supply the imprint material to the substrate, and a control unit configured to control the supply unit so as to supply the imprint material from the plurality of discharge outlets onto the shot region, wherein the control unit determines discharge outlets to be used to supply the imprint material to the shot region among the plurality of discharge outlets based on discharge history information indicating a history of discharge of the imprint material from each of the plurality of discharge outlets.