The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 09, 2019

Filed:

Nov. 19, 2015
Applicant:

Shimadzu Corporation, Kyoto, JP;

Inventors:

Satoshi Tokuda, Kyoto, JP;

Toshinori Yoshimuta, Kyoto, JP;

Hiroyuki Kishihara, Kyoto, JP;

Yukihisa Wada, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01T 1/24 (2006.01); G01T 1/20 (2006.01); G01T 7/00 (2006.01); H01L 27/146 (2006.01); H01L 31/108 (2006.01);
U.S. Cl.
CPC ...
G01T 1/20 (2013.01); G01T 1/24 (2013.01); G01T 7/00 (2013.01); H01L 27/146 (2013.01); H01L 27/14618 (2013.01); H01L 31/108 (2013.01); H01L 2224/16225 (2013.01); H01L 2224/73204 (2013.01);
Abstract

In a radiation detector, a Schottky electrode is formed such that an interdiffusion coefficient between the material of an outermost surface electrode formed on the Schottky electrode and the material of the Schottky electrode is smaller than an interdiffusion coefficient between the material of the outermost surface electrode and Al (aluminum). Consequently, the material of the outermost surface electrode does not diffuse into the Schottky electrode, and Schottky functions can be maintained, and at the same time, the material of the Schottky electrode does not diffuse into the outermost surface electrode, and the outermost surface electrode can be prevented from alloying.


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