The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2019
Filed:
Mar. 14, 2018
Invensense, Inc., San Jose, CA (US);
Johannes Schumm, Zurich, CH;
Andreas Reinhard, Dubendorf, CH;
Thomas Kraehenbuehl, Zurich, CH;
Stefan Thiele, Jona, CH;
Rene Hummel, Baar, CH;
Chung-Hsien Lin, Hsinchu, TW;
Wang Shen Su, Tainan, TW;
Tsung Lin Tang, Kaohsiung, TW;
Chia Min Lin, Hsinchu, TW;
InvenSense, Inc., San Jose, CA (US);
Abstract
A sensor includes a deformable membrane that deflects in response to a stimuli. The sensor further includes a capacitive element coupled to the deformable membrane. The capacitive element is disposed within an enclosed cavity of the sensor. The capacitive element changes capacitance in response to the deformable membrane deflecting. The capacitive element comprises a getter material for collecting gas molecules within the enclosed cavity.