The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2019
Filed:
Jun. 03, 2011
Applicants:
Siegfried Krassnitzer, Feldkirch, AT;
Juerg Hagmann, Sax, CH;
Inventors:
Siegfried Krassnitzer, Feldkirch, AT;
Juerg Hagmann, Sax, CH;
Assignee:
OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON, Pfäffikon SZ, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/35 (2006.01); C23C 14/00 (2006.01); C23C 14/02 (2006.01); C23C 14/32 (2006.01); C23C 14/58 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 14/35 (2013.01); C23C 14/0089 (2013.01); C23C 14/021 (2013.01); C23C 14/325 (2013.01); C23C 14/5873 (2013.01); H01J 37/32055 (2013.01);
Abstract
The invention relates to an arc deposition device, comprising a cathode, an anode, as well as a voltage source for putting the anode at positive potential relative to the cathode. The device also comprises magnetic elements, which cause a magnetic field over the cathode surface, wherein the anode is arranged in the vicinity of the cathode in such a way that the magnetic field lines exiting from the cathode surface hit the anode.