The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2019
Filed:
Sep. 07, 2016
Applicant:
Toshiba Memory Corporation, Minato-ku, JP;
Inventors:
Takashi Hirotani, Yokkaichi, JP;
Minori Kajimoto, Fujisawa, JP;
Assignee:
TOSHIBA MEMORY CORPORATION, Minato-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/11582 (2017.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11582 (2013.01); H01L 28/00 (2013.01);
Abstract
A semiconductor memory device according to one embodiment includes a substrate, a stacked body provided on a first-direction side of the substrate, a semiconductor member extending in the first direction, and a charge storage film provided between the stacked body and the semiconductor member. The stacked body includes first insulating films and electrode films stacked alternately along the first direction. A recess is made in a surface of the stacked body facing the semiconductor member every one of the electrode films.