The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2019
Filed:
Dec. 11, 2014
Tokyo Institute of Technology, Meguro-ku, JP;
Asahi Glass Company, Limited, Chiyoda-ku, JP;
Japan Science and Technology Agency, Kawaguchi-shi, JP;
Hideo Hosono, Meguro-ku, JP;
Yoshitake Toda, Meguro-ku, JP;
Katsuro Hayashi, Meguro-ku, JP;
Setsuro Ito, Meguro-ku, JP;
Satoru Watanabe, Chiyoda-ku, JP;
Naomichi Miyakawa, Chiyoda-ku, JP;
Toshinari Watanabe, Chiyoda-ku, JP;
Kazuhiro Ito, Chiyoda-ku, JP;
TOKYO INSTITUTE OF TECHNOLOGY, Meguro-ku, JP;
AGC Inc., Chiyoda-ku, JP;
JAPAN SCIENCE AND TECHNOLOGY AGENCY, Kawaguchi-shi, JP;
Abstract
A C12A7 electride thin film fabrication method includes a step of forming an amorphous C12A7 electride thin film on a substrate by vapor deposition under an atmosphere with an oxygen partial pressure of less than 0.1 Pa using a target made of a crystalline C12A7 electride having an electron density within a range of 2.0×10cmto 2.3×10cm.