The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 02, 2019

Filed:

Dec. 16, 2015
Applicant:

Commissariat À L'énergie Atomique ET Aux Énergies Alternatives, Paris, FR;

Inventors:

Valentin Genuer, Saint-Sauveur, FR;

Pierre Marcoux, Saint Egreve, FR;

Emmanuelle Schultz, Saint Egreve, FR;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/47 (2006.01); G02B 21/00 (2006.01); G03H 1/04 (2006.01);
U.S. Cl.
CPC ...
G01N 21/474 (2013.01); G01N 21/4788 (2013.01); G02B 21/0092 (2013.01); G01N 2021/4792 (2013.01); G03H 2001/045 (2013.01); G03H 2001/0447 (2013.01); G03H 2001/0452 (2013.01); G03H 2001/0469 (2013.01); G03H 2222/31 (2013.01); G03H 2223/20 (2013.01);
Abstract

A system is provided for observing objects on a substrate which includes a light source that emits polarized light rectilinearly along a first direction, a holder that receives said substrate having a surface and includes objects, wherein at least one of the holder or the substrate are translucent or opaque, a detector that collects the backscattered light from the interaction between the light emitting by the light source and the objects, a polarization splitter and a quarter-wave plate wherein the polarization splitter and the quarter-wave plate are arranged so that the polarization splitter directs light towards the substrate through the quarter-wave plate, and wherein the light forms a beam and the system modifies the size of the beam. The system thus allows one to observe objects on a non-transparent substrate.


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