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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10244615 B1

PDFFull Text
Date of Patent:
Mar. 26, 2019

Filed:

Feb. 20, 2015

Radio frequency power source device, and power source for dual cathodes

Applicant:

Kyosan Electric Mfg. Co., Ltd., Yokohama-shi, Kanagawa, JP;

Inventors:

Itsuo Yuzurihara, Yokohama, JP;

Shinichi Kodama, Yokohama, JP;

Toshiyuki Adachi, Yokohama, JP;

Assignee:

KYOSAN ELECTRIC MFG. CO., LTD., Yokohama-shi, JP;

Attorney:

Westerman, Hattori, Daniels & Adrian, LLP

Primary Examiner:

Crystal L Hammond

Int. Cl.
CPC ...
H05H 1/46 (2006.01); H02M 5/42 (2006.01); H01L 21/203 (2006.01); H01L 21/31 (2006.01); H02M 5/08 (2006.01); H02M 7/12 (2006.01); H01J 37/32 (2006.01); H01J 37/34 (2006.01); C23C 14/34 (2006.01);
U.S. Cl.
CPC ...
H05H 1/46 (2013.01); H01J 37/32174 (2013.01); H01J 37/3438 (2013.01); H01J 37/3444 (2013.01); H01L 21/203 (2013.01); H01L 21/31 (2013.01); H02M 5/08 (2013.01); H02M 5/42 (2013.01); H02M 7/12 (2013.01); C23C 14/34 (2013.01); H05H 2001/4682 (2013.01);
Abstract

There is provided a radio frequency power source device configured to change a voltage ratio between two output end voltages, by switching a connection state of a voltage divider that divides the radio frequency voltage, in such a manner that the radio frequency voltage is divided into voltage outputs in antiphase with each other with respect to ground potential, and high voltage and low voltage are delivered in switching manner. Switching of the connection state in the voltage divider enables selective delivery of voltage having different values, high voltage or low voltage, and by selecting and delivering high voltage for the time high voltage is required, reduction of the voltage output from the radio frequency output circuit is prevented.

Find Patent Forward Citations

Yuzurihara, Itsuo. (2019). Radio frequency power source device, and power source for dual cathodes (U.S. Patent No. 10244615). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10244615

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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