The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2019
Filed:
Dec. 22, 2015
Applicant:
AZ Electronic Materials (Luxembourg) S.a.r.l., Luxembourg, LU;
Inventors:
Huirong Yao, Plainsboro, NJ (US);
M. Dalil Rahman, Flemington, NJ (US);
Douglas McKenzie, Easton, PA (US);
JoonYeon Cho, Bridgewater, NJ (US);
Assignee:
AZ Electronic Materials (Luxembourg) S.à.r.l., Luxembourg, LU;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 18/08 (2006.01); C23C 18/10 (2006.01); C23C 18/12 (2006.01); C09D 5/00 (2006.01); G03F 7/09 (2006.01); G03F 7/11 (2006.01); C09D 1/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/11 (2013.01); C09D 1/00 (2013.01); C09D 5/006 (2013.01); G03F 7/091 (2013.01);
Abstract
Compositions having a high metal content comprising a metal salt solution, a stabilizer and one or more optional additives, wherein the metal salt solution comprises a metal ion, a counter ion and a solvent. The compositions are useful for forming films on substrates in the manufacture of solid state and integrated circuit devices.