The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2019
Filed:
Jul. 05, 2017
Alexei Maznev, Allston, MA (US);
Keith A. Nelson, Newton, MA (US);
Abdelhak Bensaoula, Houston, TX (US);
Jateen S. Gandhi, Houston, TX (US);
Donna Washington Stokes, Friendswood, TX (US);
Rebecca Lynne Forrest, Houston, TX (US);
Hyun Doug Shin, Cambridge, MA (US);
Alexei Maznev, Allston, MA (US);
Keith A. Nelson, Newton, MA (US);
Abdelhak Bensaoula, Houston, TX (US);
Jateen S. Gandhi, Houston, TX (US);
Donna Washington Stokes, Friendswood, TX (US);
Rebecca Lynne Forrest, Houston, TX (US);
Hyun Doug Shin, Cambridge, MA (US);
Massachusetts Institute of Technology, Cambridge, MA (US);
Abstract
Quality control of a periodic structure is performed using the damping rate of acoustic waves generated in the periodic structure. In this technique, an excitation light beam illuminates the first layer in the periodic structure to excite an acoustic wave. Possible irregularities in the periodic structure can scatter the acoustic wave, thereby increasing the damping rate of the acoustic wave. A sequence of probe light beams illuminates the periodic structure to measure the acoustic wave as a function of time to generated a temporal signal representing the damping rate of the acoustic signal. The acquired damping rate is employed to evaluate the quality of the periodic structure.