The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2019
Filed:
May. 29, 2014
Horiba Stec, Co., Ltd., Kyoto-shi, Kyoto, JP;
Masanori Terasaka, Kyoto, JP;
HORIBA STEC, Co., Ltd., Kyoto-shi, Kyoto, JP;
Abstract
A heating vaporization system provided with: a container that heats and vaporizes a source to produce source gas; a pipe for leading out the source gas; a sensor flow path that is provided in the pipe; a flow rate detecting part that is provided with a thermal type flow rate sensor provided in the sensor flow path, and measures a flow rate of the source gas flowing through the pipe; a flow rate regulating part that regulates the flow rate of the source gas flowing through the pipe located upstream of the flow rate detecting part; and a control part that uses a result of the detection by the flow rate detecting part to control the flow rate regulating part.