The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2019
Filed:
Dec. 17, 2014
Applicant:
Murata Machinery, Ltd., Kyoto-shi, Kyoto, JP;
Inventors:
Assignee:
MURATA MACHINERY, LTD., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 9/08 (2006.01); B08B 5/00 (2006.01); H01L 21/67 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
B08B 9/08 (2013.01); B08B 5/00 (2013.01); H01L 21/67017 (2013.01); H01L 21/67389 (2013.01); H01L 21/67769 (2013.01);
Abstract
A purge device includes an internal space defined by a chassis, and performs a purge process where an inside of a storage container in the internal space with an article being accommodated is purged with a purge gas. The purge device includes an air blower that is located outside the chassis, and sends air to an area where a gas including the purge gas in the internal space leaks through an opening in the chassis so as to diffuse the gas including the purge gas leaking from the opening.