The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 19, 2019

Filed:

Apr. 19, 2018
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;

Inventors:

Seok-Jung Yun, Iksan-si, KR;

Joon-Hee Lee, Seongnam-si, KR;

Seong-Soon Cho, Suwon-si, KR;

Assignee:

SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01); H01L 21/822 (2006.01); H01L 27/11556 (2017.01); H01L 27/11597 (2017.01); H01L 27/11578 (2017.01); H01L 27/1157 (2017.01); H01L 27/11551 (2017.01); H01L 29/792 (2006.01); H01L 29/788 (2006.01); H01L 21/28 (2006.01); H01L 21/8234 (2006.01); H01L 21/768 (2006.01); H01L 27/105 (2006.01); H01L 29/78 (2006.01); H01L 27/11582 (2017.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/8221 (2013.01); H01L 21/28282 (2013.01); H01L 21/76816 (2013.01); H01L 21/76832 (2013.01); H01L 21/76877 (2013.01); H01L 21/823475 (2013.01); H01L 27/1052 (2013.01); H01L 27/1157 (2013.01); H01L 27/11551 (2013.01); H01L 27/11556 (2013.01); H01L 27/11578 (2013.01); H01L 27/11582 (2013.01); H01L 27/11597 (2013.01); H01L 28/00 (2013.01); H01L 29/7827 (2013.01); H01L 29/7889 (2013.01); H01L 29/7926 (2013.01);
Abstract

A vertical memory device may include a plurality of word lines spaced apart in a first direction, each extending in a second direction perpendicular to the first direction and having a first width in a third direction perpendicular to the first and second directions, a dummy word line over an uppermost word line, including an opening and having a portion thereof with the first width in the third direction, a first string selection line (SSL) and a second string selection line (SSL) over the dummy word line, the first and second SSLs being at substantially the same level along the first direction, each of the first and second SSLs having a second width less than the first width in the third direction, and a plurality of vertical channel structures, each through the word lines, the dummy word line, and one of the first and second SSLs.


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