The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2019
Filed:
Aug. 29, 2017
Applied Materials, Inc., Santa Clara, CA (US);
Banqiu Wu, Sunnyvale, CA (US);
Nag B. Patibandla, Pleasanton, CA (US);
Toshiaki Fujita, Sakura, JP;
Ralf Hofmann, Soquel, CA (US);
Pravin K. Narwankar, Sunnyvale, CA (US);
Jeonghoon Oh, Saratoga, CA (US);
Srinivas Satya, Sunnyvale, CA (US);
Li-Qun Xia, Cupertino, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Methods of processing a plurality of substrates using a processing chamber with bottom and top openings and a plurality of processing slots are provided. A substrate positioned on a carrier is loaded into a first end of a processing chamber body through the bottom opening. The carrier is moved through a plurality of processing slots to a top opening at a second end of the chamber body and then removed from the processing chamber through the top opening.