The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 19, 2019

Filed:

Jun. 06, 2017
Applicants:

Tsinghua University, Beijing, CN;

Hon Hai Precision Industry Co., Ltd., New Taipei, TW;

Inventors:

Peng Liu, Beijing, CN;

Wei Zhao, Beijing, CN;

Xiao-Yang Lin, Beijing, CN;

Duan-Liang Zhou, Beijing, CN;

Chun-Hai Zhang, Beijing, CN;

Kai-Li Jiang, Beijing, CN;

Shou-Shan Fan, Beijing, CN;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/00 (2006.01); H01J 37/30 (2006.01); C01B 32/182 (2017.01); C01G 39/06 (2006.01); H01J 37/302 (2006.01); B82Y 20/00 (2011.01); H01J 37/305 (2006.01); H01J 37/31 (2006.01); H01J 37/315 (2006.01); H01J 37/317 (2006.01); B82Y 35/00 (2011.01);
U.S. Cl.
CPC ...
H01J 37/3002 (2013.01); C01B 32/182 (2017.08); C01G 39/06 (2013.01); H01J 37/302 (2013.01); B82Y 20/00 (2013.01); B82Y 35/00 (2013.01); C01P 2004/24 (2013.01); H01J 37/3056 (2013.01); H01J 37/31 (2013.01); H01J 37/315 (2013.01); H01J 37/3174 (2013.01); Y10S 977/734 (2013.01); Y10S 977/755 (2013.01); Y10S 977/932 (2013.01);
Abstract

The disclosure relates to an electronic beam machining system. The system includes a vacuum chamber; an electron gun located in the vacuum chamber and used to emit electron beam; a holder located in the vacuum chamber and used to fix an object; a control computer; and a diffraction unit located in the vacuum chamber; the diffraction unit includes a two-dimensional nanomaterial; the electron beam transmits the two-dimensional nanomaterial to form a transmission electron beam and a plurality of diffraction electron beams; the transmission electron beam and the plurality of diffraction electron beams radiate the object to form a transmission spot and a plurality of diffraction spots.


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