The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 19, 2019

Filed:

May. 02, 2016
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Takayuki Uozumi, Utsunomiya, JP;

Shigeki Kato, Shimotsuke, JP;

Takashi Seki, Tokyo, JP;

Yusuke Kasai, Saitama, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01); G06T 7/00 (2017.01); G06T 5/20 (2006.01); G01N 21/84 (2006.01); G01N 21/55 (2014.01); G06T 7/32 (2017.01); G06T 7/37 (2017.01); G01N 21/57 (2006.01);
U.S. Cl.
CPC ...
G06T 5/20 (2013.01); G01N 21/55 (2013.01); G01N 21/8422 (2013.01); G06T 7/32 (2017.01); G06T 7/37 (2017.01); G01N 21/57 (2013.01); G01N 2021/8427 (2013.01);
Abstract

A measuring apparatus includes an optical system configured to project light onto a sample and to receive light via the sample, an imaging device configured to take an image of a light source via the optical system, and a processor configured to obtain an optical characteristic of the sample based on an output of the imaging device. The processor is configured to determine a coefficient of a Wiener filter based on one of the image and a Fourier transform thereof and corresponding one of the light source (an aperture in an aperture unit) and a Fourier transform thereof, and obtain the optical characteristic based on the Wiener filter of which the coefficient has been determined, a Fourier transform of the image, and a Fourier transform of the light source.


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