The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2019
Filed:
Jun. 05, 2017
Applicant:
Coherent Lasersystems Gmbh & Co. KG, Göttingen, DE;
Inventor:
Igor Bragin, Göttingen, DE;
Assignee:
COHERENT LASERSYSTEMS GMBH & CO. KG, Göttingen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); G03F 7/20 (2006.01); H01S 3/134 (2006.01); H01S 3/225 (2006.01); H01S 3/03 (2006.01); H01S 3/038 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70025 (2013.01); G03F 7/70041 (2013.01); G03F 7/70216 (2013.01); G03F 7/70558 (2013.01); H01S 3/03 (2013.01); H01S 3/038 (2013.01); H01S 3/134 (2013.01); H01S 3/225 (2013.01);
Abstract
Excimer laser annealing apparatus includes and excimer laser delivering laser-radiation pulses to a silicon layer supported on a substrate translated with respect to the laser pulses such that the consecutive pulses overlap on the substrate. The energy of each of the laser-radiation pulses is monitored, transmitted to control-electronics, and the energy of a next laser pulse is adjusted by a high-pass digital filter.