The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 19, 2019

Filed:

Mar. 09, 2016
Applicant:

Mitsubishi Electric Corporation, Chiyoda-ku, JP;

Inventors:

Shimpei Ogawa, Chiyoda-ku, JP;

Daisuke Fujisawa, Chiyoda-ku, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/35 (2014.01); G01N 21/3504 (2014.01); H01L 35/32 (2006.01); H01L 37/02 (2006.01); G01J 5/00 (2006.01); H01L 27/16 (2006.01); G01J 5/08 (2006.01); G01J 5/02 (2006.01); G01J 5/10 (2006.01); G01J 5/20 (2006.01); H01L 27/146 (2006.01); G01N 21/25 (2006.01);
U.S. Cl.
CPC ...
G01N 21/3504 (2013.01); G01J 5/0014 (2013.01); G01J 5/023 (2013.01); G01J 5/024 (2013.01); G01J 5/0862 (2013.01); G01J 5/10 (2013.01); G01J 5/20 (2013.01); H01L 27/14649 (2013.01); H01L 27/16 (2013.01); H01L 35/32 (2013.01); H01L 37/02 (2013.01); G01N 2021/258 (2013.01);
Abstract

An electromagnetic wave detector that selectively detects electromagnetic waves of wavelength λA includes a temperature detection unit that includes: a substrate including a cavity portion; a wavelength selection structure that generates a surface plasmon resonance with an electromagnetic wave of a predetermined wavelength λA for converting to heat and absorbing, and a detection film that detects the absorbed heat; and a support structure that retains the temperature detection unit above the cavity portion; wherein the support structure further includes a reflection structure that reflects the electromagnetic waves of the absorption wavelength of the support structure.


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