The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 12, 2019

Filed:

Feb. 26, 2018
Applicant:

Renesas Electronics Corporation, Tokyo, JP;

Inventors:

Yoshinao Miura, Tokyo, JP;

Hironobu Miyamoto, Hitachinaka, JP;

Assignee:

Renesas Electronics Corporation, Koutou-ku, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/778 (2006.01); H01L 29/20 (2006.01); H01L 29/205 (2006.01); H01L 29/06 (2006.01); H01L 29/417 (2006.01); H01L 29/47 (2006.01); H01L 21/02 (2006.01); H01L 29/66 (2006.01); H01L 21/3213 (2006.01); H01L 21/306 (2006.01); H01L 21/027 (2006.01); H01L 21/285 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7787 (2013.01); H01L 21/0254 (2013.01); H01L 21/02389 (2013.01); H01L 29/0657 (2013.01); H01L 29/2003 (2013.01); H01L 29/205 (2013.01); H01L 29/41758 (2013.01); H01L 29/475 (2013.01); H01L 29/66462 (2013.01); H01L 21/0273 (2013.01); H01L 21/28581 (2013.01); H01L 21/30621 (2013.01); H01L 21/32139 (2013.01);
Abstract

Characteristics of a semiconductor device are improved. A semiconductor device of the present invention includes a buffer layer composed of a first nitride semiconductor layer, a channel layer composed of a second nitride semiconductor layer, and a barrier layer composed of a third nitride semiconductor layer, which are sequentially laminated, and a cap layer composed of a fourth nitride semiconductor layer of mesa type, which is formed over the barrier layer. The semiconductor device also includes a source electrode formed on one side of the cap layer, a drain electrode formed on the other side of the cap layer, and a first gate electrode formed over the cap layer. The first gate electrode and the cap layer are Schottky-joined. A Schottky gate electrode (the first gate electrode) is provided over the cap layer in this way, so that when a gate voltage is applied, an electric field is applied to the entire cap layer and a depletion layer spreads. Therefore, it is possible to suppress a gate leakage current.


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