The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 12, 2019

Filed:

Jul. 09, 2015
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Yoichi Ikarashi, Fujisawa, JP;

Shuji Yamada, Atsugi, JP;

Tadayuki Yoshitake, Cambridge, MA (US);

Takao Ogura, Yokohama, JP;

Takeo Tsukamoto, Kawasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 35/08 (2006.01); G01N 23/083 (2018.01); H05G 1/06 (2006.01);
U.S. Cl.
CPC ...
H01J 35/08 (2013.01); G01N 23/083 (2013.01); H01J 2235/081 (2013.01); H01J 2235/186 (2013.01); H05G 1/06 (2013.01);
Abstract

A transmission-type target includes a target layer and a transmissive substrate. The target layer is configured to generate X-rays in response to irradiation of electrons. The transmissive substrate supports the target layer and is configured to allow the X-rays generated in the target layer to pass therethrough. The transmissive substrate includes polycrystalline diamond in which grain boundaries extend in a substrate thickness direction and a substrate plane direction. The grain boundaries define an electrical potential of the target layer.


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