The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 2019
Filed:
Jun. 22, 2015
Fraunhofer-gesellschaft Zur Foerderung Angewandten Forschung E.v., Munich, DE;
Abstract
An arrangement for determining characteristics or parameters of a sample, or a layer formed on or in the sample, has detectors, spatially resolving spectral analysis of electromagnetic radiation within a wavelength interval, provided in rows or in a row and column arrangement, whereby electromagnetic radiation emitted from a broadband radiation source is incident on the detectors after reflecting off, and/or passing through, the sample, or layer formed on or in the sample, upon which is observed a homogeneous intensity of the electromagnetic radiation, and an electronic evaluation unit connected to the detectors compares the spatially-resolved and wavelength-resolved signals detected by the detectors with a theoretical wavelength dependent progression of the respective radiation intensities obtained through simulation or with a progression obtained by calibration on a known sample, in order to obtain information for the measurement position detected, and determine the spatially-resolved distribution of the characteristics or parameters.