The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2019
Filed:
Mar. 31, 2016
Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek Tno, s-Gravenhage, NL;
Federico Pettazzi, 's-Gravenhage, NL;
Erwin John Van Zwet, 's-Gravenhage, NL;
Frerik Van Beijnum, 's-Gravenhage, NL;
Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO, 's-Gravenhage, NL;
Abstract
A multi-beam laser cavity unit () comprises a laser crystal () and lens array () disposed in the laser cavity (LC). The lens array comprises an integral piece formed by a plurality of interconnected lenses. Each lens () is configured to form a respective closed optical path (OPa) along the length (Z) of the laser cavity (LC) between the cavity mirrors () through the laser crystal () corresponding to a cavity mode for generating one (LBa) of the plurality of parallel laser beams (LB). The cavity unit () can be comprised in a laser system receiving pump light (PL) from a plurality of light sources. For example, the system can be used in a maskless patterning device.