The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2019
Filed:
Dec. 07, 2016
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventor:
Hyowon Kim, Seongnam-si, KR;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/16 (2006.01); H01L 21/02 (2006.01); H01L 29/66 (2006.01); H01L 29/786 (2006.01); B82Y 40/00 (2011.01); H01L 29/778 (2006.01); C01B 32/186 (2017.01); C01B 32/194 (2017.01); B82Y 30/00 (2011.01); H01L 29/167 (2006.01);
U.S. Cl.
CPC ...
H01L 29/1606 (2013.01); B82Y 40/00 (2013.01); C01B 32/186 (2017.08); C01B 32/194 (2017.08); H01L 21/0262 (2013.01); H01L 21/02381 (2013.01); H01L 21/02444 (2013.01); H01L 21/02491 (2013.01); H01L 21/02502 (2013.01); H01L 21/02527 (2013.01); H01L 21/02576 (2013.01); H01L 21/02579 (2013.01); H01L 21/02587 (2013.01); H01L 29/66045 (2013.01); H01L 29/66977 (2013.01); H01L 29/778 (2013.01); H01L 29/78684 (2013.01); B82Y 30/00 (2013.01); C01B 2204/04 (2013.01); H01L 29/167 (2013.01);
Abstract
A multilayer graphene, a method of forming the same, a device including the multilayer graphene, and a method of manufacturing the device are provided. In the method of forming the multilayer graphene, a first graphene is formed on an underlayer, and then a multilayer graphene is formed by exposing two adjacent areas on the first graphene to a source gas. By differentiating temperatures and source gasses, the multilayer graphene has different electrical characteristics in the two adjacent areas.