The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2019
Filed:
Sep. 04, 2012
Robertus Petrus Van Kampen, S-Hertogenbosch, NL;
Anartz Unamuno, Dresden, DE;
Richard L. Knipe, McKinney, TX (US);
Roberto Gaddi, S-Hertogenbosch, NL;
Rashed Mahameed, Beaverton, OR (US);
Robertus Petrus Van Kampen, S-Hertogenbosch, NL;
Anartz Unamuno, Dresden, DE;
Richard L. Knipe, McKinney, TX (US);
Roberto Gaddi, S-Hertogenbosch, NL;
Rashed Mahameed, Beaverton, OR (US);
CAVENDISH KINETICS, INC., San Jose, CA (US);
Abstract
The present invention generally relates to a MEMS device having a plurality of cantilevers that are coupled together in an anchor region and/or by legs that are coupled in a center area of the cantilever. The legs ensure that each cantilever can move/release from above the RF electrode at the same voltage. The anchor region coupling matches the mechanical stiffness in all sections of the cantilever so that all of the cantilevers move together.