The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 05, 2019

Filed:

Apr. 14, 2017
Applicant:

Applied Spectra, Inc., Fremont, CA (US);

Inventors:

Jong Hyun Yoo, Milpitas, CA (US);

Chunyi Liu, Fremont, CA (US);

Alexander A. Bol'shakov, Hayward, CA (US);

Richard E. Russo, Walnut Creek, CA (US);

Xianglei Mao, Castro Valley, CA (US);

Randolph S. Tribe, San Jose, CA (US);

Osman Sorkhabi, San Ramon, CA (US);

Assignee:

Applied Spectra, Inc., Fremont, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/30 (2006.01); G01N 21/71 (2006.01); B23K 26/04 (2014.01); H01J 49/04 (2006.01); H01J 49/10 (2006.01);
U.S. Cl.
CPC ...
G01N 21/718 (2013.01); B23K 26/048 (2013.01); H01J 49/0468 (2013.01); H01J 49/105 (2013.01);
Abstract

Methods for laser induced ablation spectroscopy are disclosed. A position sensor, and position motors can move a sample stage in three independent spatial coordinate directions, and a stage position control circuit can move an analysis sample site to selected coordinate positions for ablation. Light from laser ablation can be gathered into a lightguide fiber bundle that is subdivided into branches. One branch can convey a first portion of the light to a broadband spectrometer operable to analyze a relatively wide spectral segment, and a different branch can convey a second portion of the light to a high dispersion spectrometer operable to measure minor concentrations and/or trace elements. Emissions can be simultaneously analyzed in various ways using a plurality of spectrometers having distinct and/or complementary capabilities, and isotope analysis of a sample can be performed.


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