The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 05, 2019

Filed:

Oct. 30, 2017
Applicant:

Canon Anelva Corporation, Kawasaki-shi, JP;

Inventors:

Yohsuke Kawasaki, Kawasaki, JP;

Itaru Enomoto, Kawasaki, JP;

Isao Mochizuki, Kawasaki, JP;

Assignee:

CANON ANELVA CORPORATION, Kawasaki-Shi, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 21/34 (2006.01); H01J 41/06 (2006.01);
U.S. Cl.
CPC ...
G01L 21/34 (2013.01); H01J 41/06 (2013.01);
Abstract

Provided are an excellent cold cathode ionization gauge and an excellent cold cathode ionization gauge cartridge. The cold cathode ionization gauge includes: an anode; a cathode, which has a tubular shape, and is arranged to surround the anode; a seal for sealing one opening of the cathode; a first member, which faces the seal inside the cathode, and has a through hole formed therein; a partition for partitioning a space surrounded by the cathode, the seal, and the first member into a first space that the first member faces and a second space that the seal faces; and a light source, which is arranged in the partition or the second space, and is configured to emit an electromagnetic wave, in which a gap is formed between at least part of an outer peripheral portion of the partition and the cathode.


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