The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2019
Filed:
Sep. 16, 2014
Applicant:
Sumitomo Chemical Company, Limited, Tokyo, JP;
Inventor:
Akira Hasegawa, Tsukuba, JP;
Assignee:
SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 16/50 (2006.01); C23C 16/42 (2006.01); H01L 51/00 (2006.01); H01L 51/44 (2006.01); H01L 51/52 (2006.01); C23C 16/40 (2006.01); C23C 16/503 (2006.01); C23C 16/54 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 16/50 (2013.01); C23C 16/401 (2013.01); C23C 16/42 (2013.01); C23C 16/503 (2013.01); C23C 16/545 (2013.01); H01J 37/3266 (2013.01); H01J 37/3277 (2013.01); H01L 51/0097 (2013.01); H01L 51/448 (2013.01); H01L 51/5253 (2013.01); Y02E 10/549 (2013.01); Y02P 70/521 (2015.11);
Abstract
Provided is a laminate film having a substrate and at least one thin film layer which is formed on at least one surface of the substrate, wherein