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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10217871 B1

PDFFull Text
Date of Patent:
Feb. 26, 2019

Filed:

Sep. 26, 2016

Method of controlling electric conductivity of metal oxide thin film and thin film transistor including the metal oxide film having the controlled electric conductivity

Applicant:

Industry-academic Cooperation Foundation of Ajou University, Suwon-si, Gyeonggi-do, KR;

Inventors:

Hyungtak Seo, Seoul, KR;

Jin Seo Kim, Seoul, KR;

Sang Yeon Lee, Suwon-si, KR;

Assignee:

Industry-Academic Cooperation Foundation of Ajou University, Suwon-si, KR;

Attorneys:

Vorys, Sater, Seymour & Pease LLP

Mih Suhn Koh

Primary Examiner:

Igwe U Anya

Int. Cl.
CPC ...
H01L 29/786 (2006.01); H01L 21/02 (2006.01); H01L 29/04 (2006.01); H01L 29/22 (2006.01); H01L 29/24 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7869 (2013.01); H01L 21/02554 (2013.01); H01L 21/02565 (2013.01); H01L 21/02667 (2013.01); H01L 29/04 (2013.01); H01L 29/22 (2013.01); H01L 29/24 (2013.01); H01L 29/66969 (2013.01); H01L 29/78696 (2013.01);
Abstract

A method for controlling an electric conductivity of a metal oxide thin film is disclosed. The method may include forming a metal oxide thin film; applying thermal treatment to the metal oxide thin film; and irradiating UV (ultraviolet)-rays to the metal oxide thin film in an atmosphere containing water molecules and oxygen molecules. Thus, the hydrogen may be doped into the metal oxide thin film to improve the electric conductivity of the metal oxide thin film.

Find Patent Forward Citations

Seo, Hyungtak. (2019). Method of controlling electric conductivity of metal oxide thin film and thin film transistor including the metal oxide film having the controlled electric conductivity (U.S. Patent No. 10217871). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10217871

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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