The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 26, 2019

Filed:

Dec. 13, 2017
Applicants:

Sumitomo Electric Industries, Ltd., Osaka, JP;

Tohoku University, Sendai-shi, Miyagi, JP;

Inventors:

Yasunori Tateno, Yokohama, JP;

Masaki Ueno, Itami, JP;

Masaya Okada, Itami, JP;

Fuminori Mitsuhashi, Itami, JP;

Maki Suemitsu, Sendai, JP;

Hirokazu Fukidome, Sendai, JP;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 29/16 (2006.01); H01L 21/311 (2006.01); H01L 29/423 (2006.01); H01L 29/10 (2006.01); H01L 29/417 (2006.01); H01L 29/51 (2006.01); H01L 29/786 (2006.01); H01L 29/45 (2006.01); H01L 29/49 (2006.01); H01L 29/66 (2006.01); H01L 21/02 (2006.01); H01L 21/04 (2006.01); H01L 51/05 (2006.01);
U.S. Cl.
CPC ...
H01L 29/1606 (2013.01); H01L 21/02 (2013.01); H01L 21/0228 (2013.01); H01L 21/02164 (2013.01); H01L 21/02178 (2013.01); H01L 21/02378 (2013.01); H01L 21/02381 (2013.01); H01L 21/02527 (2013.01); H01L 21/02631 (2013.01); H01L 21/04 (2013.01); H01L 21/043 (2013.01); H01L 21/044 (2013.01); H01L 21/311 (2013.01); H01L 21/31116 (2013.01); H01L 21/31144 (2013.01); H01L 29/10 (2013.01); H01L 29/1079 (2013.01); H01L 29/16 (2013.01); H01L 29/417 (2013.01); H01L 29/41733 (2013.01); H01L 29/41775 (2013.01); H01L 29/423 (2013.01); H01L 29/42364 (2013.01); H01L 29/42372 (2013.01); H01L 29/42384 (2013.01); H01L 29/45 (2013.01); H01L 29/49 (2013.01); H01L 29/4908 (2013.01); H01L 29/51 (2013.01); H01L 29/517 (2013.01); H01L 29/66 (2013.01); H01L 29/66045 (2013.01); H01L 29/786 (2013.01); H01L 29/78648 (2013.01); H01L 29/78684 (2013.01); H01L 29/78696 (2013.01); H01L 51/05 (2013.01);
Abstract

An electron device having a channel layer made of graphene is disclosed. The electron device includes a graphene layer on a substrate, and a source electrode, a drain electrode, and a gate insulating film on the graphene layer. The electron device further includes a first gate electrode on the gate insulating film between the source electrode and the drain electrode, and a second gate electrode within the substrate. For the second gate electrode, another gate insulating film is on the graphene layer, or alternatively, a part of the substrate is interposed between the second gate electrode and the channel layer.


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