Power integrated devices, electronic devices and electronic systems including the same

Abstract

A power integrated device includes a channel region, a source region, a drift region, and a drain region. A stacked gate includes a gate insulation layer and a gate electrode. The stacked gate having a plurality of stacked gate extension portions that extend from the stacked gate to over the plurality of deep trench field insulation layers. A plurality of deep trench field insulation layers is disposed in the drift region. The deep trench field insulation layers are spaced apart from each other in a channel width direction. A height of the deep trench field insulation layers is greater than a width of the deep trench field insulation layer.