The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 26, 2019

Filed:

Sep. 30, 2016
Applicant:

Semiconductor Energy Laboratory Co., Ltd., Atsugi-shi, Kanagawa-ken, JP;

Inventors:

Shunpei Yamazaki, Tokyo, JP;

Masahiro Katayama, Tochigi, JP;

Ami Sato, Tochigi, JP;

Yukinori Shima, Gunma, JP;

Assignee:

Semiconductor Energy Laboratory Co., Ltd., Atsugi-shi, Kanagawa-ken, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/12 (2006.01); H01L 27/06 (2006.01); G02F 1/1333 (2006.01); G02F 1/1368 (2006.01); H01L 29/786 (2006.01); G02F 1/133 (2006.01); G02F 1/1343 (2006.01); G02F 1/1362 (2006.01); G06F 3/041 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1255 (2013.01); G02F 1/1368 (2013.01); G02F 1/133345 (2013.01); H01L 27/0629 (2013.01); H01L 27/124 (2013.01); H01L 27/1225 (2013.01); H01L 29/7869 (2013.01); G02F 1/13306 (2013.01); G02F 1/13338 (2013.01); G02F 1/134336 (2013.01); G02F 1/136286 (2013.01); G02F 2001/133302 (2013.01); G02F 2201/121 (2013.01); G02F 2201/123 (2013.01); G06F 3/0412 (2013.01);
Abstract

A semiconductor device including a capacitor having an increased charge capacity without decreasing an aperture ratio is provided. The semiconductor device includes a transistor including a light-transmitting semiconductor film, a capacitor in which a dielectric film is provided between a pair of electrodes, and a pixel electrode electrically connected to the transistor. In the capacitor, a conductive film formed on the same surface as the light-transmitting semiconductor film in the transistor serves as one electrode, the pixel electrode serves as the other electrode, and a nitride insulating film and a second oxide insulating film which are provided between the light-transmitting semiconductor film and the pixel electrode serve as the a dielectric film.


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