The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2019
Filed:
Jan. 09, 2015
Applicant:
Murata Machinery, Ltd., Kyoto-shi, Kyoto, JP;
Inventors:
Masanao Murata, Ise, JP;
Takashi Yamaji, Ise, JP;
Assignee:
MURATA MACHINERY, LTD., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67393 (2013.01); H01L 21/67379 (2013.01); H01L 21/67775 (2013.01);
Abstract
A nozzle prevents obstruction of alignment of a container without using an actuator. When the nozzle contacts the container before an alignment member does, the container is guided by a guide surface of the nozzle, the nozzle is lowered by a load applied from the container so that the alignment member contacts the container to align the container, and purge gas is injected from the nozzle into the container.