The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 26, 2019

Filed:

Jun. 07, 2017
Applicant:

Gatan, Inc., Pleasanton, CA (US);

Inventors:

Alexander Jozef Gubbens, Palo Alto, CA (US);

Paul Mooney, Pleasanton, CA (US);

Matthew Lent, Livermore, CA (US);

Assignee:

GATAN, INC., Warrendale, PA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01T 1/20 (2006.01); H01J 37/244 (2006.01);
U.S. Cl.
CPC ...
G01T 1/2018 (2013.01); H01J 37/244 (2013.01); H01J 2237/2441 (2013.01); H01J 2237/2443 (2013.01); H01J 2237/2446 (2013.01); H01J 2237/24485 (2013.01);
Abstract

A hybrid arrangement of more than one electron energy conversion mechanism in an electron detector is arranged such that an image can be acquired from both energy converters so that selected high-illumination parts of the electron beam can be imaged with an indirectly coupled scintillator detector and the remainder of the image acquired with the highsensitivity/direct electron portion of the detector without readjustments in the beam position or mechanical positioning of the detector parts. Further, a mechanism is described to allow dynamically switchable or simultaneous linear and counted signal processing from each pixel on the detector so that high-illumination areas can be acquired linearly without severe dose rate limitation of counting and lowillumination regions can be acquired with counting.


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