The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 26, 2019

Filed:

Sep. 09, 2016
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Makoto Furuhata, Matsumoto, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01C 19/574 (2012.01); G01C 19/5712 (2012.01);
U.S. Cl.
CPC ...
G01C 19/574 (2013.01); G01C 19/5712 (2013.01);
Abstract

An oscillator includes a substrate, a detection flap plate which is disposed facing the substrate, and an elastically deformable beam portion which displaceably supports the detection flap plate in a Z axis direction with respect to the substrate, in which the detection flap plate is displaced to the substrate side in a range in which recovery force of the beam portion is larger than the electrostatic force which is formed between the substrate and the detection flap plate. That is, when a boundary at which electrostatic force and recovery force are equal is a pull in critical point, the detection flap plate is displaced within a region above the pull in critical point.


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