The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 26, 2019

Filed:

Apr. 15, 2016
Applicant:

Industry-university Cooperation Foundation Hanyang University, Seoul, KR;

Inventors:

Hak-Sung Kim, Seoul, KR;

Wan-Ho Chung, Paju-si, KR;

Sung-Hyeon Park, Gimhae-si, KR;

Dong-Hyun Kim, Seoul, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/06 (2006.01); G01R 27/02 (2006.01); G01R 31/309 (2006.01);
U.S. Cl.
CPC ...
G01B 11/06 (2013.01); G01R 31/309 (2013.01);
Abstract

Disclosed are an apparatus and a method for non-contact sample analysis using terahertz waves. The apparatus includes an emission unit radiating terahertz waves onto a sample provided with a conductive material layer, and a receiving unit receiving terahertz waves reflected from the sample or terahertz waves passing through the sample. The apparatus further includes a characteristic analysis unit including at least one selected from a group consisting of a sheet resistance analysis unit analyzing a sheet resistance of the conductive material layer, a coverage density analysis unit analyzing a coverage density of the conductive material layer, a component analysis unit analyzing a component of the conductive material layer, and a thickness analysis unit analyzing a thickness of the conductive material layer by using the received terahertz waves, a display unit displaying a result derived from the characteristic analysis unit as an image, and an input unit configured to input information to the characteristic analysis unit.


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